Global Extreme Ultraviolet (euv) Lithography Market Size & Outlook

The global extreme ultraviolet (euv) lithography market size was estimated at USD 10,159.5 million in 2024 and is projected to reach USD 26,436.1 million by 2030, growing at a CAGR of 18.6% from 2025 to 2030.
Revenue, 2024 (US$M)
$10,159.5
Forecast, 2030 (US$M)
$26,436.1
CAGR, 2025 - 2030
18.6%
Report Coverage
Worldwide

Global extreme ultraviolet (euv) lithography market, 2018-2030 (US$M)

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Global extreme ultraviolet (euv) lithography market highlights

  • The global extreme ultraviolet (euv) lithography market generated a revenue of USD 10,159.5 million in 2024 and is expected to reach USD 26,436.1 million by 2030.
  • The market is expected to grow at a CAGR (2025 - 2030) of 18.6% by 2030.
  • In terms of segment, light source accounted for a revenue of USD 4,565.1 million in 2024.
  • Light Source is the most lucrative equipment segment registering the fastest growth during the forecast period.
  • In terms of region, Asia Pacific was the largest revenue generating market in 2024.
  • Country-wise, China is expected to register the highest CAGR from 2025 to 2030.

Global data book summary

Market revenue in 2024USD 10,159.5 million
Market revenue in 2030USD 26,436.1 million
Growth rate18.6% (CAGR from 2025 to 2030)
Largest segmentLight source
Fastest growing segmentLight Source
Historical data covered2018 - 2023
Base year for estimation2024
Forecast period covered2025 - 2030
Quantitative unitsRevenue in USD million
Market segmentationLight Source, Optics, Mask

Other key industry trends

  • In terms of revenue, the North America accounted for 10.4% of the global extreme ultraviolet (euv) lithography market in 2024.
  • By country, the Taiwan is projected to lead the global market in terms of revenue in 2030.
  • By country, China is the fastest growing regional market and is projected to reach USD 4,414.5 million by 2030.

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Extreme Ultraviolet (EUV) Lithography Market Companies

Name Profile # Employees HQ Website
Toppan Holdings Inc View profile 59210 1-5-1 Taito, Taito-ku, Tokyo, Japan, 110-8560 https://www.holdings.toppan.com
Ushio Inc View profile 5887 2-6-1 Otemachi, Chiyoda-ku, Tokyo, Japan, 100-8150 https://www.ushio.co.jp
ASML Holding NV ADR View profile 42713 De Run 6501, Veldhoven, NB, Netherlands, 5504 DR https://www.asml.com
Taiwan Semiconductor Manufacturing Co Ltd ADR View profile 76478 No. 8, Li-Hsin Road 6, Hsinchu Science Park, Hsinchu, Taiwan, 300-096 https://www.tsmc.com
ZEISS Group View profile 10001+ Oberkochen, Baden-Wurttemberg, Germany, Europe http://www.zeiss.com
Nikon Corp View profile 19444 Konan 2-15-3 Shinagawa Intercity Building C, Minato-ku, Tokyo, Japan, 108-6290 http://www.nikon.co.jp
Samsung Electronics Co Ltd View profile 124804 129, Samsung-ro, Yeongtong-gu, Gyeonggi-do, Suwon-si, Korea, Republic of, 443-742 https://www.samsung.com
Canon Inc View profile 169151 30-2, Shimomaruko 3-Chome, Ohta-ku, Tokyo, Japan, 146-8501 https://www.global.canon
Intel Corp View profile 124800 2200 Mission College Boulevard, Santa Clara, CA, United States, 95054-1549 https://www.intel.com

Global extreme ultraviolet (euv) lithography market size, by regions, 2018-2030 (US$M)

Top 10 countries: Extreme ultraviolet (euv) lithography market size, 2024 (US$M)

Global extreme ultraviolet (euv) lithography market share, by equipment, 2024 & 2030 (%, US$M)

Extreme ultraviolet (euv) lithography market: Opportunity assessment by country

Global extreme ultraviolet (euv) lithography market, by region, 2024 (US$M)

Global extreme ultraviolet (euv) lithography market size, by regions, 2018-2030 (US$M)

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